1999FY(平成9年度)
E. HIGURASHI, R. SAWADA, T. ITO, Optically induced angular alignment of birefringent
micro-objects by linear polarization, Appl. Phys. Lett., Vol. 73, No. 21, pp3034-3036.1999.
E. HIGURASHI, R. SAWADA, T. ITO, Axial and Lateral Displacement Measurements of a
Microsphere Based on the Critical-Angle Method, Jpn. J. Appl. Phys., Vol. 37, No. 7, pp4191-4196,
1999.
E. HIGURASHI, R. SAWADA, T. ITO, Optically induced rotation of a trapped micro-object about an
axis perpendicular to the laser beam axis, Appl. Phys. Lett., Vol. 72, No. 23, pp2951-2953, 1999.
R. SAWADA, E. HIGURASHI, T. ITOH, Etalon combining silicon waveguide and Si plate,
Technical Digest of IEEE/LEOS International MOEMS'99, (Aug.30-Sept.1, Mainz, Germany),
140-144, 1999.
E. HIGURASHI, R. SAWADA, T. ITOH, Assembly and angular alignment of micro-optical
components using a linearly polarized light, Digest of Technical Papers Transducers’99 , (Sendai,
Japan),pp390-391, 1999.
T. ITO, R.SAWADA, E. HIGURASHI, T. KIYOKURA, Fabrication of Microstructure using Fluorinated
Polyimide and Silicone-based Positive Photoresist, HARMST’99, (Kisarazu, Japan), pp98-99, 1999.
T. ITO, R. SAWADA, E. HIGURASHI, Micro IC Probe For LSI Testing, Technical Digest Of IEEE The
Twelfth MEMS’99, (Orland, Florida, USA), 263-266, 1999.
1998FY(平成10年度)
E. HIGURASHI, O. OHGUCHI, T. TAMAMURA, H. UKITA, R. SAWADA, Optically induced
rotation of dissymmetrically shaped fluorinated polyimide micro-objects in optical traps, J. Appl.
Phys., Vol. 82, No. 6, pp2773-2779, 1998
伊藤高廣、輿水博、松井伸介、澤田廉士, SPP(Silicone-based Positive Photoresist)マスクによるポ
リイミドの三次元立体加工, 電気学会論文誌E 第117巻第1号 57-58頁, 1998.
R. SAWADA, E. HIGURASHI, T. ITOH, M. TSUBAMOTO, Integrated micro-displacement sensor
that can be incorporated into mini 3-dimensional actuator stage, Technical Digest of IEEE/LEOS
Summer Topical Meetings, Optical MEMS’98, MEMS (July 20-23, Monterey, USA), 47-48, 1998.
R. SAWADA, H. NAKADA, F. OHIRA, Highly accurate and quick bonding for planar lightwave circuit
and laser-diode chip, Technical Digest of IEEE/IMAPS, 2nd 1998 IEMT/IMC SYMPOSIUM, (April
15-17, Omiya, Japan), 133-137, 1998.
1997FY(平成9年度)
A. FURUYA, F. SHIMOKAWA, T. MATUURA, R. SAWADA, Fabrication of fluorinated polyimide
microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an
ion drag integrated micropump, J. Micromech. Microeng., Vol. 6, pp310-319(平成8年)
R. SAWADA, J. SHIMADA, T. ITO, E. HIGURASHI, M. TSUBAMOTO, O.OHGUCHI, Integrated
micro focusing and tracking sensor, Technical Digest of IEEE/LEOS MOEMS'97, (November 18-21,
Nara, Japan), 132-136(平成9 年11 月)
T. ITO, R. SAWADA, E. HIGURASHI, Integrated micro laser Doppler velocimeter, Technical Digest
of IEEE/LEOS MOEMS'97, (November 18-21, Nara, Japan), pp.29-32(平成9 年11 月)
E. HIGURASHI, R. SAWADA, T. ITO, Alignment and orientation of birefringent micro-objects using
optical radiation pressure of linearly polarized laser beams, Technical Digest of IEEE/LEOS
MOEMS'97, (November 18-21, Nara, Japan), pp186-189(平成9 年11 月)
R. SAWADA, E. HIGURASHI, T. ITO, M. TSUBAMOTO, O. OHGUCHI, Integrated Micro-laser
Displacement Sensor, Proc. of IEEE The Tenth MEMS' 97, (November 18-21, Nara, Japan),
pp.29-32((平成9 年1 月)
1996FY(平成8年度)
E. HIGURASHI, R. SAWADA, O. OHGUCHI, T. TAMAMURA, H. UKITA, Rotational manipulation
of trapped micro-objects about their axes perpendicular to the laser beam axis by radiation
pressure, Technical Digest of CLEO’96 in Europe, (Hamburg Germany), CWF75, 201(平成8 年
9 月)
1995FY(平成7年度)
J. SHIMADA, Y. KATAGIRI, O. OHGUCHI, R. SAWADA, Optical micro displacement sensor using a
composite cavity laser diode integrated with a microlens, J. Micromech. Microeng., Vol. 4, pp140-146
(平成6年)
A. FURUYA, F. SHIMOKAWA, T. MATSUURA, R. SAWADA, Fluorinated polyimide fabrication by
magnetically controlled reactive ion etching (MC RIE), J. Micromech. Microeng., Vol. 4, pp67-73(平
成6年)
J. SHIMADA, O. OHGUCHI, R. SAWADA, Focusing Characteristics of a Wide-Striped Laser Diode
Integrated with a Microlens, IEEE J. of Lightwave Technol., Vol. 12, No. 6, pp936-942(平成6年6月)
嶋田純一、大口脩、澤田廉士、田中秀尚、渡部昭憲, マイクロレンズを用いた半導体レーザと光フ
ァイバの集積形結合素子, 電子情報通信学会論文誌C-I 第J77-C-I巻第6号 390-397頁(平成6年6月)
R. SAWADA, H. TANAKA, O. OHGUCHI, J. SHIMADA, F. SHIMOKAWA, Fabrication of Optical
Microencoder, Int. J. Japan Soc. Prec. Eng., Vol. 28, No. 1, pp1-4(平成6年3月)
O. OHGUCHI, A. TAGO, J. SHIMADA, R. SAWADA, Silicon (110) Grid for Ion Beam Processing
Systems, 13th IVC-13/ICSS-9, (Yokohama Japan), p289(平成7 年9 月)
R. SAWADA, Integrated optical encoder, Digest of Technical Papers Transducers’95, Stockholm
Sweden), 281-284(平成7 年6 月)
T. ANNO, S. KATSUKI, H. UNNO, M. YOKOTA, R. SAWADA, I. FUJII, M. SHIMIZU, The Soot
Deposited Integrated Circuit Substrate of 6 inches Diameter for High Voltage ICs, Improved in the
Durability against the Pressure Cooker Test, ISPSD'95, pp.298-302(平成7 年5 月)
1994FY(平成6年度)
S. HARA, H. NAKADA, R. SAWADA, Y. ISOMURA, High Precision Bonding of Semiconductor Laser
Diodes, Int. J. Japan Soc. Prec. Eng., Vol. 27, No. 1, pp49-53(平成5年3月)
R. SAWADA, O. OHGUCHI, K. Mise, M. TSUBAMOTO, Fabrication of Advanced Integrated Optical
Micro-encoder Chip, Proc. of IEEE MEMS’94, pp337-342( (平成6年1月)
1993FY(平成5年度)
J. SHIMADA, O. OHGUCHI, R. SAWADA, Gradient-index microlens formed by ion-beam sputtering,
Applied Optics, Vol. 31, No. 25, pp5230-5236(平成4年9月)
J. SHIMADA, O. OHGUCHI, R. SAWADA, H. TANAKA, A. WATABE, Efficient coupling device
between a laser diode and optical fiber with an integrated microlens, Fourth MOC/GRIN’93,
pp.286-289 (1993).(平成5 年)
R. SAWADA, H. NAKADA, Characteristics of soot bonding, The 3rd IUMRS International
Conference on Advanced Materials, Trans. Mat. Res. Soc. Jpn. , pp.185-1190 (1993).(平成5 年9
月)
J. SHIMADA, O. OHGUCHI, R. SAWADA, H.TANAKA, A. WATABE, Efficient coupling device
between a laser diode integrated with a microlens and an optical fiber, ECIO’93, ECIO’93,
(Neuchatel, Switzerland), pp. 11.6-7 (1993).,(平成5 年4 月)
A. FURUYA, F. SHIMOKAWA, T. MATSUURA, R. SAWADA, Micro-grid fabrication of fluorinated
polyimide by using magnetically controlled reactive ion etching (MC-RIE), Proc. of IEEE MEMS’93,
(Florida USA), pp.59-64 (1993).平成5 年2 月)
1992FY(平成4年度)
J. SHIMADA, O. OHGUCHI, R. SAWADA, Microlens Fabricated by Planar Process, IEEE J. of
Lightwave Technol., Vol. 9, No. 5, pp571-576(平成3年5月)
R. SAWADA, J. WATANABE, H. NAKADA, K. KOYABU, Soot Bonding Process and Its Application to
Si Dielectric Isolation, J. Electrochem. Soc., Vol. 138, No. 1, pp185-188(平成3年1月)
A. FURUYA, F. SHIMOKAWA, T. MATSUURA, R. SAWADA, Highly selective etching of fluorinated
polyimides by magnetically controlled reactive ion etching (MC-RIE), Proc. 1st International Conf. on
Intelligent Materials , (Tokyo Japan), pp.57-6(平成4 年3 月)
1991FY(平成3年度)
F. SHIMOKAWA, H. TANAKA, R. SAWADA, S. HARA, Continuous-wave operation and mirror loss of
U-shaped GaAs/AlGaAs laser diode with two totally reflecting mirrors, Appl. Phys. Lett., Vol. 56, No.
17, pp1617-1619(平成2年4月)
F. SHIMOKAWA, H. TANAKA, Y.UENISHI, R. SAWADA, Reactive-fast-atom beam etching of GaAs
using Cl2 gas, J. Applied Physics, Vol. 66, No. 6, pp2613-2618(平成1年6月)
R. SAWADA, H. NAKADA, Application of dielectric isolation technology based on soot bonding, Proc.
Of ISPSD’91, pp.203-208 (平成3 年4 月)
J. SHIMADA, O. OHGUCHI, R. SAWADA, Microlens integrated with a laser diode by using the
planar process, Digest of CLEO'91, (Baltimore USA), pp.316(平成3 年5 月)
1990FY(平成2年度)
Y. UENISHI, Y. ISOMURA, R. SAWADA, H. UKITA, T. TOSHIMA, Beam converging laser diode by
taper ridged waveguide, Electronics Letters, Vol. 24, No. 10, pp623-624(昭和63年5月)
H. TANAKA, F. SHIMOKAWA, R. SAWADA, S. HARA, A GaAs/AlGaAs bent waveguide laser with
total reflection mirrors, Digest of CLEO'90, (USA), Abstract No. 276, pp380 (1990) (平成2 年5 月)
J. SHIMADA, O. OHGUCHI, R. SAWADA, Microlens Fabricated by the Planar Process, Third
OEC'90 Technical Digest, Third OEC'90 Technical Digest, (Chiba, Japan) pp.134-135 (1990)
(平成2 年7 月)
R. SAWADA, H. TANAKA, O. OHGUCHI, J. SHIMADA, S. HARA, Fabrication of active integrated
optical micro-encoder, Proc. of IEEE MEMS’91, Third OEC'90 Technical Digest, (Chiba, Japan)
pp.134-135 (1990), (平成3 年1 月)
1989FY(平成1年度)
M. KASHIO, T. KODAKA, R. SAWADA, K. KOYABU, Proc. of THE SYMPOSIUM ON HIGH
VOLTAGE & SMART POWER ICs 89-15, (San Jose, USA), Abstract No. 275, pp 261-270 (1989).
(平成1 年5 月)
R. SAWADA, J. WATANABE, H. NAKADA, K. KOYABU, Soot bonding process for Si dielectric
isolation, Proc. of THE SYMPOSIUM ON HIGH VOLTAGE & SMART POWER ICs 89-15 (San Jose,
USA), pp.251-260 (1989). (平成1 年5 月)
1988FY(昭和63 年度)
R. SAWADA, J. WATANABE, Bonding Process Applying A Flame Hydrolysis Technology To
Silicon Dielectric Isolated Substrate Production, Proc. of ISPSD’88, (Tokyo), pp.141-146 (1988)
1987FY(昭和62年度)
Y. UENISHI, Y. ISOMURA, R. SAWADA, H. UKITA, T. TOSHIMA, Laser diode with a ridged
waveguide for converging the beam width parallel to the junction plane, Technical Digest
MOC'87, pp.114-117 (1987)(昭和62 年)
1986FY(昭和61年度)
R. SAWADA, J. WATANABE, Application of flame hydrolysis technology to dielectric isolated
substrate, Extended Abstracts 86-2 of Electrochem. Soc., Fall Meeting, pp392-393 ,1986
1984FY(昭和59年度)
R. SAWADA , Durability of Mechanical Damage Gettering Effect in Si Wafers, Jpn. J. Appl. Phys., Vol.
23, No. 8, pp959-964
R. SAWADA, T. KARAKI, J. WATANABE, Automatic Thickness Measurement of a Single Si crystal
Island surrounded by SiO2 Dielectric Film and Polysilicon Layer, Bull. Japan Soc. of Prec. Engg., Vol.
18, No. 4, pp293-298, 1984
R. SAWADA, T. KARAKI, J. WATANABE, Automatic Thickness Measurement of a Single Si
Island surrounded by SiO2 Dielectric Film and Polysilicon Layer, Proceedings of Imeko TC.14
International Symposium on Metrology for Quality Control in Production, (Tokyo),
pp.254-259 ,1984.
1983FY(昭和58年度)
R. SAWADA, T. KARAKI, J. WATANABE, Generation of Dislocations Introduced by Bending Stress
in a Si Wafer, Applied Physics, Vol. A-31, pp109-114
渡辺純二、唐木俊郎、鈴木淳平、澤田廉士, 複合構成半導体基板自動加工システムの開発, 精密機械
第49巻第3号 383~388頁
1982FY(昭和57年度)
R. SAWADA, T. KARAKI, J. WATANABE, Bending gettering of Si crystalline defects, J. Appl. Phys.,
Vol. 53, No. 10, pp6983-6988
1981FY(昭和56年度)
R. SAWADA, T. KARAKI, J. WATANABE, Mechanical Damage Gettering Effect in Si, Jpn. J. Appl.
Phys., Vol. 20, No. 11, pp2097-2104
R. SAWADA, T. KARAKI, J. WATANABE, Gettering of crystalline defects in Si by bending, Appl.
Phys. Lett., Vol. 38, No. 5, pp368-369
1980FY(昭和55年度)
毛利彰、澤田廉士、高田勝, 異常検出法の人間−機械系への応用, 計測自動制御学会論文集 第16巻
第3号 72~78頁

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