2000 FY(平成12年度)
R. SAWADA, J. SHIMADA, E. HIGURASHI, T. ITO, Integrated micro focusing and tracking sensor, J.
Micromech. Microeng., Vol. 9, pp71-77, 2000.
R. SAWADA, E. HIGURASHI, T. ITO, O. OHGUCHI, M. TSUBAMOTO, Monolithically integrated
micro-laser encoder, Applied Optics, Vol. 38, No. 33, pp6866-6873, 2000.
E. HIGURASHI, R. SAWADA, T. ITO, Nanometer-displacement detection of optically trapped
metallic particles based on critical angle method for small force detection, Rev. Sci. Instrum., Vol. 70,
No.7, pp3068-3073, 2000.
E. HIGURASHI, R. SAWADA, T. ITO, Monolithically integrated optical displacement sensor based on
triangulation and optical beam deflection, Applied Optics, Vol. 38, No. 9, pp1746-1751, 2000.
E. HIGURASHI, R. SAWADA, T. ITO, Optically induced angular alignment of trapped birefringent
micro-objects by linearly polarized light, Phys. Rev. E, Vol. 59, No. 3-B, pp3676-3681, 2000.
T. ITO, R. SAWADA, E. HIGURASHI, Integrated Microlaser Doppler Velocimeter, IEEE J. Lightwave
Technol., Vol. 17, No. 1, pp30-34, 2000.
R. SAWADA, E.HIGURASHI, T. ITO, Application of fluorinated polyimide waveguide to integrated
optical sensors, 2nd ISOMW 2000 Proc., (Japan, Saitama Riken), 72-73, 2000.
Y. UENISHI, J. YAMAGUCHI, T. YAMAMOTO, N. TAKEUCHII, A. SHIMIZU, E. HIGURASHI, R.
SAWADA, Free-space optical cross connect switch based on a 3D MEMS mirror array, Technical
Digest of IEEE/LEOS The 15th Annual Meeting of the IEEE, Vol.1, 59-60, 2000.
R. SAWADA, E. HIGURASHI, T. ITOH, An Accelerometer Incorporating A Micro-Laser Encoder for A
Wide Measurable Range, Technical Digest of IEEE/LEOS International Optical MEMS’2000, (Aug.
21-25, Hawaii, USA), 145-146, 2000.
E. HIGURASHI, R. SAWADA、High-accuracy micro-encoder based on the higher-order diffracted
light interference,Technical Digest of IEEE/LEOS International Optical MEMS’2000, (Aug. 21-25,
Hawaii, USA), 143-144, 2000.
T. KIYOKURA, T. ITO, R. SAWADA、A prism interferometer for a compact optical spectrum analyzer、
Technical Digest of 5th OECC’2000, (Makuhari, Japan), 378-379, 2000.
R. SAWADA, E. HIGURASHI, O. OHGUCHI, Y. JIN, Long-Life Micro-Laser Encoder,Long-Life
Micro-Laser Encoder
Proc. of IEEE The Thirteenth MEMS' 2000, (Miyazaki, Japan), 491-495,2000.

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