2001FY(平成13年度)
T. KIYOKURA, T. ITO, R. SAWADA, Prism interferometer for a compact Fourier-transform
spectroscope, Optics Letters, Vol. 25, No. 12, pp893-895, 2001.
T. ITO, R. SAWADA, E. HIGURASHI, Fabrication of micro IC probe for LSI testing, Sensors and
Actuators A, Vol. 80, pp126-131, 2001.
T. KIYOKURA, T. ITO, R. SAWADA, Small FTIR System Using A Prism-Scanning Interferometer,
Pittcon 2001, (Mar. 4; New Orleans, USA.) No.1135, 2001.
R. SAWADA, E. HIGURASHI, A. SHIMIZU, T. MARUNO, Single Crystalline Mirror Actuated
Electrostatically by Terraced Electrodes With High-Aspect Ratio Torsion Spring, Technical Digest
of IEEE/LEOS Optical MEMS’2001, (Sept. 25-28, Okinawa, Japan), 23-24, 2001.
E. HIGURASHI, R. SAWADA, T. ITOH, An integrated laser Doppler blood flowmeter for a
wearable health monitoring system, Technical Digest of IEEE/LEOS Optical MEMS’2001, (Aug.
25-28, Okinawa, Japan), pp49-50, 2001.
R. SAWADA, E. HIGURASHI, A. SHIMIZU, O. OHGUCHI, Accelerometer Fabricated Using
SODIC Substrate and Micro-Laser Encoder, Technical Digest of IEEE/LEOS International Optical
MEMS’2001, (Sept. 25-28, Okinawa, Japan), 55-56, 2001..

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