2002FY(平成14年度)
T. KIYOKURA, T. ITO, R. SAWADA, Small Fourier Transform Spectroscope Using an Integrated
Prism-Scanning Interferometer, Applied Spectroscopy, Vol. 55, No. 12, (2002)pp1628-1633, 2002.
R. SAWADA, E. HIGURASHI, F. SHIMOKAWA, O. OHGUCHI, A. TAGO, Silicon (110) grid for ion
beam processing systems, J. Micromech. Microeng., Vol. 11, pp561-566, 2002.
R. SAWADA, H. NAKADA, E. HIGURASHI, T. ITO, Highly accurate and quick bonding of a
laser-diode chip onto a planar lightwave circuit, Precision Engineering Technology, Vol. 25,
pp293-300, 2002.
E. HIGURASHI, R. SAWADA, T. ITO, Optically driven angular alignment of microcomponents
made of in-plane birefringent polyimide film based on optical angular momentum transfer, J.
Micromech. Microeng., Vol. 11, pp140-145, 2002.
E. HIGURASHI, R. SAWADA, T. ITO, Hybrid integrated optical s
ensor for noninvasive blood flow monitoring, Technical Digest of IEEE/LEOS Optical MEMS’2002,
(Aug. 20-23, Lugano, Switzerland), 33-34, 2002.
R. SAWADA, J. YAMAGUCHI, E. HIGURASHI, A. SHIMIZU, T. YAMAMOTO, N. TAKEUCHII, Y.
UENISHI, Single Crystal 1024ch MEMS Mirror Based on Terraced Electrodes and High-Aspect
Ratio Torsion Spring for 3-D Cross-Connect Switch, Technical Digest of IEEE/LEOS Optical
MEMS’2002, (Aug. 20-23, Lugano, Switzerland), 11-12, 2002.
E. HIGURASHI, R. SAWADA, An Integrated Fizeau-type Interferometric Displacement Sensor For A
Feedback-Controlled Actuation System, Proc. of IEEE The Fifteenth MEMS’02, , (USA, Las Vegas),
pp348-351, 2002.T.
ITO, R. SAWADA, E. HIGURASHI, T. KIYOKURA, Fabrication of microstructure using fluorinated
polyimide and silicone-based positive photoresist, Microsystem Technologies, Vol. 6, pp165-168,
2002.

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