2003FY(平成15年度)
T. ITO, R. SAWADA, E. HIGURASHI, Integrated micro-displacement sensor that uses beam
divergence, J. Micromech. Microeng., Vol. 13(2003)pp942-947, 2003
E. HIGURASHI, R. SAWADA, T. ITO, An Integrated Laser Blood Flowmeter, IEEE J. Lightwave
Technol., Vol. 21, No.3, (2003) pp591-595, 2003.
R. SAWADA, E. HIGURASHI, Y. JIN, Hybrid Microlaser Encoder, IEEE J. Lightwave Technol., Vol.
21, No. 3, (2003) pp815-820, 2003
R. SAWADA, E. HIGURASHI, T. ITO, Integrated microlaser displacement sensor, J. Micromech.
Microeng.,Vol. 12, (2003) pp286-290, 2003.
E. Higurashi and R. Sawada, Optical microsensors integrated on a silicon chip
IEEE Sensors2003, (Oct.22-24, Toronto, Canada), pp. 170-171, 2003.
Renshi Sawada, Tsuyoshi Yamamoto, Johji Yamaguchi, Takenobu Takeuchi, Akira Shimizu,Yuji
Uenishi, and Eiji Higurashi, 3D-Mirror Array with Terraced Electrodes and High Aspect Ratio Springs,
The 5th Pacific Rim Conference on Laser and Electro-Optics, Proceedings Volume 1, W1I-(15)-3,
pp. 143 (2003).Invited, 2003.
T. Yamamoto, J. Yamaguchi, N. Takeuchi, A. Shimizu, R. Sawada, E. Higurashi, and Y. Uenishi,
A three-dimensional MEMS optical switch module using low-cost highly accurate polymer
components, 9th Microoptics Conference, (Oct. 29-31, Odaiba, Japan) pp.92-95, 2003.
R. SAWADA, J.YAMAGUCHI, E. HIGURASHI, A. SHIMIZU, T. YAMAMOTO, N. TAKEUCHII, Y.
UENISHI, Improved Single Crystalline Mirror Actuated Electrostatically By Terraced Electrodes
With High-Aspect Ratio Torsion Spring, Technical Digest of IEEE/LEOS International Optical
MEMS’2003, (Aug. 18-21, Hawaii, USA), 153-154, 2003.

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