2005FY (平成17年度)
E. HIGURASHI, R. SAWADA, Micro-encoder based on higher-order diffracted light interference J.
Micromech. Microeng., Vol.15(2005)1459-1465, 2005
Eiji Higurashi, T. Itoh, T. Suga, and Renshi Sawada, Low-temperature LD Direct Bonding for
Highly Functional Optical MEMS, IEEE/LEOS Optical MEMS’05, (1-4 Aug., Oulu, Finland),
pp.201-202, (2005) (invited)(平成17年8月)
Eiji Higurashi, T. Itoh, T. Suga, and Renshi Sawada, Surface Activated Flip-chip Bonding of Laser
Chips, InterPack’05 (July, 17-22, San Francisco, CA. USA,), Track 8 Optical MEMS, , 8-2
Optical MEMS-II,IPACK2005-73436, pp.64(2005)
Eiji Higurashi, T. Suga, and Renshi Sawada, Low-temperature Direct Flip-Chip Bonding for
Integrated Micro-systems, LEOS2005 , October 23-27, Sydney, Australia, ML1, 121-122 (invited)
(2005), 2005

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