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Michitaka Yamamotoa, Takeshi Satoa, Eiji Higurashib, Tadatomo Sugaa, and Renshi Sawadac, Low-temperature bonding of laser diode chips using atmospheric-pressure plasma activation of flat topped Au stud bumps with smooth surfaces, IEEE CPMT (Components, Packaging, and Manufacturing Technology) Symposium Japan, 2012.

T.Takeshita, H. Ogino,H. Ando, T. Kobayashi, R. Sawada, Detection of micro mirror rotationby applyingmicro displacement sensor, IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012),( 23rd to 28th September, 2012, Pacifico Yokohama, Yokohama, Japan), C-4-026-011, (2012).

B. Sun,Y. Pen, W. Iwasaki, T. Takeshita, and R.Sawada,Two-spring-constant fiber scanner with high frequency vibration and large scanning angle, IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012),( 23rd to 28th September, 2012, Pacifico Yokohama, Yokohama, Japan), C-4-026-013, (2012).

Yao Peng, Bin Sun, wataru Iwasaki, renshi Sawada, Vibration characteristics of the fiber scanning with two springs,(September, 22-24, 2012, Shanghai, China), The 3rd Japan-China-Korea joint conference on MEMS/NEMS (JCK2012),Technical Program and Proceedings, pp.42-43, (2012).

Takuma Iwasaki, Toshihiro Talkeshita, Renshi Sawada, Study of a shearing force sensor embedded in a bedsore prevention mattress, (September, 22-24, 2012, Shanghai, China), The 3rd Japan-China-Korea joint conference on MEMS/NEMS (JCK2012),Technical Program and Proceedings, pp.26-27, (2012).

Watari Iwasaki, Masaki Nakamura, Takeshi Gotanda, eiji Higurashi, Renshi Sawada, Application of a micro blood flow sensor to monitoring blood flow during running,(September, 22-24, 2012, Shanghai, China), The 3rd Japan-China-Korea joint conference on MEMS/NEMS (JCK2012),Technical Program and Proceedings, pp.18-19, (2012).

S. Yamamoto, E. Higurashi, T. Suga, and R. Sawada, gLow-temperature hermetic packaging for microsystems by Au-Au surface activated bonding in atmospheric pressure environment,h J. Micromech. Microeng., Vol. 22, No. 5, 055026 (2012)

Wataru Iwasaki, Toshihiro Takeshita, Yao Peng, Hiroaki Ogino, Hiromasa Shibata, Yuji Kudo, Ryutaro Maeda, Renshi Sawada, Maskless Lithographic Fine-Patterning Onto Deep or Slope Surface and Grayscale Lithography Using a Newly Developed Digital Mirror Array Device Lithography Equipment. JJAP, vol. 51 no. 6, 06FB05-1-06FB05-4(2012). Received date: 2011/11/30 Accepted date: 2012/02/10ADOI: 10.1143/JJAP.51.06FB05


Michitaka Yamamoto, Takeshi Sato, Eiji Higurashi, Tadatomo Suga, and Renshi Sawada , Low-temperature bonding of optical chips using coined Au stud bumps and its application to micro laser Doppler velocimeter, 3rd International IEEE Workshop on Low Temperature Bonding for 3D Integration, IEEE CPMT Society Japan Chapter, (Tokyyo university, Yayoido, 22-23, May, 2012)
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Toward Application of Engineering to Medicine, and Food Manufacturing, Renshi Sawada, JSPS
Workshop 2012, (Nov. 19, 2012 at Auditorium Room, CeLS, NUS, Singapore)
Research on a Biological Condition Analysis Based on The MEMS Blood Flow Signal
Terukazu Akiyama, and Renshi Sawada, JSPS Workshop 2012, (Nov. 19, 2012 at Auditorium
Room, CeLS, NUS, Singapore)
Characteristics and Applications of Microsensor Measuring Linear Movement and Inclination
Around Two Axes, Toshihiro Takeshita1, Takuma Iwasaki2, Hideyuki Ando3, and Renshi
Sawada, JSPS Workshop 2012, (Nov. 19, 2012 at Auditorium Room, CeLS, NUS, Singapore)
Skin Blood Flow During Running in Different Running Speed, Wataru Iwasaki1, Masaki
Nakamura1, Takeshi Gotanda1, Eiji Higurashi2 and Renshi Sawada, JSPS Workshop 2012,
(Nov. 19, 2012 at Auditorium Room, CeLS, NUS, Singapore)
Low-temperature Bonding of Laser diode Chips Using Atmospheric-pressure Plasma activation
and Its Application to Micro Laser Doppler Velocimeter, Michitaka Yamamoto1, Takeshi Sato1,
Eiji Higurashi2, Tadatomo Suga, and Renshi Sawada3, JSPS Workshop 2012, (Nov. 19, 2012 at
Auditorium Room, CeLS, NUS, Singapore)

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